Nexus S-Max™ Series

System Specification
Process Type Spatial Divided Thermal ALD by Single Substrate Scan
Substrate Size 2G(370mm x 470mm) or 200 x 200mm2
Substrate Moving Speed Max 800mm/s
Deposition Rate Al2O3 ≥ 70Å/min
Base Pressure < 5.0 x 10-3 Torr
Range in Processing Pressure > 0.5 Torr
System Dimension
( W x L x H )
1500mm x 500mm x 350mm(Height)
Optional Install max 4EA Number of Canister
Added Throttle Valve
Facilities Requirements Specification
Gases Ar, More than 4~6 Bar
Air CDA, More Than 4~6 Bar
Power of Mini ALD AC 220 V± 10%, 3 Phase, 50 Hz
Vacuum Pump Needed Vacuum Oil Rotary Pump ≤1000 L/min