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High Roll to Roll ALD

Concept & Description

concept

아이콘Atmospheric Organic / Inorganic Layer


아이콘Thermal Spatial Roll to Roll ALD

  • Low Temp. at flexible substrate
  • No Plasma Damage
  • Low Particle


아이콘Temp & Substrate Size

  • < 180 ℃ & 300mm


아이콘
We are developing Atmospheric R2R ALD using our core technology of spatial ALD gas injector enable to deposit of organic/inorganic layer on flexible substrate.